6/22/2011	10:24:14 AM	Bypass valve closed
6/22/2011	10:24:27 AM	SiCl4 post valve opened
6/22/2011	10:24:28 AM	SiCl4 post valve closed
6/22/2011	10:24:44 AM	SiCl4 post valve opened
6/22/2011	10:24:45 AM	SiCl4 post valve closed
6/22/2011	10:24:46 AM	SiCl4 post valve opened
6/22/2011	10:24:47 AM	SiCl4 post valve closed
6/22/2011	10:24:50 AM	SiCl4 pre valve opened
6/22/2011	10:24:51 AM	SiCl4 pre valve closed
6/22/2011	10:25:29 AM	SiCl4 pre valve opened
6/22/2011	10:30:12 AM	SiCl4 pre valve closed
6/22/2011	10:30:17 AM	SiCl4 pre valve opened
6/22/2011	10:30:17 AM	SiCl4 pre valve closed
6/22/2011	10:30:18 AM	SiCl4 pre valve opened
6/22/2011	10:33:51 AM	SiCl4 pre valve closed
6/22/2011	2:18:00 PM	Recipe started at 2:17 PM
6/22/2011	2:18:00 PM	Helium valve closed
6/22/2011	2:18:00 PM	H2 valve closed
6/22/2011	2:18:00 PM	BCl3 valve closed
6/22/2011	2:18:00 PM	PH3 valve closed
6/22/2011	2:18:00 PM	SiCl4 pre valve closed
6/22/2011	2:18:00 PM	SiCl4 post valve closed
6/22/2011	2:18:00 PM	Main Vac valve closed
6/22/2011	2:18:00 PM	Bubbler valve closed
6/22/2011	2:18:00 PM	Bypass valve opened
6/22/2011	2:18:00 PM	Helium MFC set to  0.000000
6/22/2011	2:18:00 PM	H2 MFC set to  0.000000
6/22/2011	2:18:00 PM	BCl3 MFC set to  0.000000
6/22/2011	2:18:00 PM	PHl3 MFC set to  0.000000
6/22/2011	2:18:00 PM	SiCl4 MFC set to  0.000000
6/22/2011	2:18:00 PM	Bypass solenoid MFC set to  0.000000
6/22/2011	2:18:00 PM	Tube furnace set to 0
6/22/2011	2:19:30 PM	Helium valve closed
6/22/2011	2:19:30 PM	H2 valve closed
6/22/2011	2:19:30 PM	BCl3 valve closed
6/22/2011	2:19:30 PM	PH3 valve closed
6/22/2011	2:19:30 PM	SiCl4 pre valve closed
6/22/2011	2:19:30 PM	SiCl4 post valve closed
6/22/2011	2:19:30 PM	Bypass valve closed
6/22/2011	2:19:30 PM	Bubbler valve closed
6/22/2011	2:19:30 PM	Main Vac valve opened
6/22/2011	2:19:30 PM	Helium MFC set to  0.000000
6/22/2011	2:19:30 PM	H2 MFC set to  0.000000
6/22/2011	2:19:30 PM	BCl3 MFC set to  0.000000
6/22/2011	2:19:30 PM	PHl3 MFC set to  0.000000
6/22/2011	2:19:30 PM	SiCl4 MFC set to  0.000000
6/22/2011	2:19:30 PM	Bypass solenoid MFC set to  0.000000
6/22/2011	2:19:30 PM	Tube furnace set to 0
6/22/2011	2:19:35 PM	Run finished at 2:19 PM
6/22/2011	3:21:50 PM	Main Vac valve closed
6/22/2011	3:21:55 PM	Main Vac valve opened
6/22/2011	3:22:11 PM	Main Vac valve closed
6/22/2011	3:22:23 PM	Main Vac valve opened
6/22/2011	3:24:20 PM	Main Vac valve closed
6/22/2011	3:32:31 PM	Recipe started at 3:32 PM
6/22/2011	3:32:31 PM	Helium valve closed
6/22/2011	3:32:31 PM	H2 valve closed
6/22/2011	3:32:31 PM	BCl3 valve closed
6/22/2011	3:32:31 PM	PH3 valve closed
6/22/2011	3:32:31 PM	SiCl4 pre valve closed
6/22/2011	3:32:31 PM	SiCl4 post valve closed
6/22/2011	3:32:31 PM	Main Vac valve closed
6/22/2011	3:32:31 PM	Bubbler valve closed
6/22/2011	3:32:31 PM	Bypass valve opened
6/22/2011	3:32:31 PM	Helium MFC set to  0.000000
6/22/2011	3:32:31 PM	H2 MFC set to  0.000000
6/22/2011	3:32:31 PM	BCl3 MFC set to  0.000000
6/22/2011	3:32:31 PM	PHl3 MFC set to  0.000000
6/22/2011	3:32:31 PM	SiCl4 MFC set to  0.000000
6/22/2011	3:32:31 PM	Bypass solenoid MFC set to  0.000000
6/22/2011	3:32:31 PM	Tube furnace set to 0
6/22/2011	3:35:22 PM	Run aborted at 3:35 PM
6/22/2011	3:35:22 PM	Helium valve closed
6/22/2011	3:35:22 PM	H2 valve closed
6/22/2011	3:35:22 PM	BCl3 valve closed
6/22/2011	3:35:22 PM	PH3 valve closed
6/22/2011	3:35:22 PM	SiCl4 pre valve closed
6/22/2011	3:35:22 PM	SiCl4 post valve closed
6/22/2011	3:35:22 PM	Bypass valve closed
6/22/2011	3:35:22 PM	Main Vac valve closed
6/22/2011	3:35:22 PM	Bubbler valve closed
6/22/2011	3:35:22 PM	Helium MFC set to  0.000000
6/22/2011	3:35:22 PM	H2 MFC set to  0.000000
6/22/2011	3:35:22 PM	BCl3 MFC set to  0.000000
6/22/2011	3:35:22 PM	PHl3 MFC set to  0.000000
6/22/2011	3:35:22 PM	SiCl4 MFC set to  0.000000
6/22/2011	3:35:22 PM	Tube furnace set to 0
6/22/2011	3:35:29 PM	Recipe started at 3:35 PM
6/22/2011	3:35:29 PM	Helium valve closed
6/22/2011	3:35:29 PM	H2 valve closed
6/22/2011	3:35:29 PM	BCl3 valve closed
6/22/2011	3:35:29 PM	PH3 valve closed
6/22/2011	3:35:29 PM	SiCl4 pre valve closed
6/22/2011	3:35:29 PM	SiCl4 post valve closed
6/22/2011	3:35:29 PM	Main Vac valve closed
6/22/2011	3:35:29 PM	Bubbler valve closed
6/22/2011	3:35:29 PM	Bypass valve opened
6/22/2011	3:35:29 PM	Helium MFC set to  0.000000
6/22/2011	3:35:29 PM	H2 MFC set to  0.000000
6/22/2011	3:35:29 PM	BCl3 MFC set to  0.000000
6/22/2011	3:35:29 PM	PHl3 MFC set to  0.000000
6/22/2011	3:35:29 PM	SiCl4 MFC set to  0.000000
6/22/2011	3:35:29 PM	Bypass solenoid MFC set to  0.000000
6/22/2011	3:35:29 PM	Tube furnace set to 0
6/22/2011	3:35:31 PM	Helium valve closed
6/22/2011	3:35:31 PM	H2 valve closed
6/22/2011	3:35:31 PM	BCl3 valve closed
6/22/2011	3:35:31 PM	PH3 valve closed
6/22/2011	3:35:31 PM	SiCl4 pre valve closed
6/22/2011	3:35:31 PM	SiCl4 post valve closed
6/22/2011	3:35:31 PM	Main Vac valve closed
6/22/2011	3:35:31 PM	Bubbler valve closed
6/22/2011	3:35:31 PM	Bypass valve opened
6/22/2011	3:35:31 PM	Helium MFC set to  0.000000
6/22/2011	3:35:31 PM	H2 MFC set to  0.000000
6/22/2011	3:35:31 PM	BCl3 MFC set to  0.000000
6/22/2011	3:35:31 PM	PHl3 MFC set to  0.000000
6/22/2011	3:35:31 PM	SiCl4 MFC set to  0.000000
6/22/2011	3:35:31 PM	Bypass solenoid MFC set to  0.000000
6/22/2011	3:35:32 PM	Tube furnace set to 0
6/22/2011	3:36:32 PM	Helium valve closed
6/22/2011	3:36:32 PM	H2 valve closed
6/22/2011	3:36:32 PM	BCl3 valve closed
6/22/2011	3:36:32 PM	PH3 valve closed
6/22/2011	3:36:32 PM	SiCl4 pre valve closed
6/22/2011	3:36:32 PM	SiCl4 post valve closed
6/22/2011	3:36:32 PM	Bypass valve closed
6/22/2011	3:36:32 PM	Bubbler valve closed
6/22/2011	3:36:32 PM	Main Vac valve opened
6/22/2011	3:36:32 PM	Helium MFC set to  0.000000
6/22/2011	3:36:32 PM	H2 MFC set to  0.000000
6/22/2011	3:36:32 PM	BCl3 MFC set to  0.000000
6/22/2011	3:36:32 PM	PHl3 MFC set to  0.000000
6/22/2011	3:36:32 PM	SiCl4 MFC set to  0.000000
6/22/2011	3:36:32 PM	Bypass solenoid MFC set to  0.000000
6/22/2011	3:36:32 PM	Tube furnace set to 0
6/22/2011	3:36:37 PM	Run finished at 3:36 PM
6/22/2011	4:38:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/22/2011	4:38:36 PM	Recipe started at 4:38 PM
6/22/2011	4:38:36 PM	Helium valve closed
6/22/2011	4:38:36 PM	H2 valve closed
6/22/2011	4:38:36 PM	BCl3 valve closed
6/22/2011	4:38:36 PM	PH3 valve closed
6/22/2011	4:38:36 PM	SiCl4 pre valve closed
6/22/2011	4:38:36 PM	SiCl4 post valve closed
6/22/2011	4:38:36 PM	Main Vac valve closed
6/22/2011	4:38:36 PM	Bypass valve closed
6/22/2011	4:38:36 PM	Bubbler valve closed
6/22/2011	4:38:36 PM	Helium MFC set to  0.000000
6/22/2011	4:38:36 PM	H2 MFC set to  0.000000
6/22/2011	4:38:36 PM	BCl3 MFC set to  0.000000
6/22/2011	4:38:36 PM	PHl3 MFC set to  0.000000
6/22/2011	4:38:36 PM	SiCl4 MFC set to  0.000000
6/22/2011	4:38:36 PM	Bypass solenoid MFC set to  0.000000
6/22/2011	4:38:36 PM	Tube furnace set to 0
6/22/2011	4:38:36 PM	Run finished at 4:38 PM
6/22/2011	4:38:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/22/2011	5:09:25 PM	Program started after a nonstandard shutdown
6/22/2011	5:09:25 PM	Helium valve closed
6/22/2011	5:09:25 PM	H2 valve closed
6/22/2011	5:09:25 PM	BCl3 valve closed
6/22/2011	5:09:25 PM	PH3 valve closed
6/22/2011	5:09:25 PM	SiCl4 pre valve closed
6/22/2011	5:09:25 PM	SiCl4 post valve closed
6/22/2011	5:09:25 PM	Main Vac valve closed
6/22/2011	5:09:25 PM	Bypass valve closed
6/22/2011	5:09:25 PM	Bubbler valve closed
6/22/2011	5:09:25 PM	Helium MFC set to  0.000000
6/22/2011	5:09:25 PM	H2 MFC set to  0.000000
6/22/2011	5:09:25 PM	BCl3 MFC set to  0.000000
6/22/2011	5:09:25 PM	PHl3 MFC set to  0.000000
6/22/2011	5:09:25 PM	SiCl4 MFC set to  0.000000
6/22/2011	5:09:25 PM	Bypass solenoid MFC set to  760.000000
6/22/2011	5:09:25 PM	Tube furnace set to 0
6/22/2011	5:09:28 PM	Bypass valve opened
